Operating instructions

Preventive Maintenance Manual

6 Quarterly Maintenance

6.1 Checking Bond module and chuck

Make a visual check of the Bond tool and the chuck. There should be

no crack or spot detectable. The surface must be flat.

6.2 Chuck Polish Check

6.2.1 Polish Bond Chuck Insert (Backside)

Use EVG polishing tool (Arkansas stone) for maintenance procedure:

Figure 126 - EVG Polish Tool

1) Clean the backside of the bond chuck insert with IPA.

2) Clean polishing tool with IPA.

3) Polish the surface with the tool by sliding the stone in a circular

movement (see below).

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