Operating instructions

Preventive Maintenance Manual
116 Copyright © 2012 EVG
5.17.2 Top Side Cooling Chuck
1) Optical Check of the System
Figure 123
2) Check if locking nuts (1) are tightened as shown in previous
drawing.
3) Check if the movement of cool chuck up and down is smoothly and
parallel.
4) Apply cooling ON/OFF in the SW and check “Cool Top off” input in
Low IO Chamber x “GW XCO #1-C3.
L1
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