Operating instructions

Monthly Maintenance

5.11 Roughing Pump

Following Roughing Pumps are used on the EVG5xx systems (depends

on vacuum system configuration).

• Pfeiffer MVP 055-3 - min. Pressure: 2mbar

• Varian SH100 - min. Pressure: 6,6 x 10-2mbar

• Varian SH110 - min. Pressure: 6,6 x 10-2mbar

• BOC Edwards XDS5 - min. Pressure: 7,0 x 10-2mbar

• BOC Edwards XDS10 - min. Pressure: 7,0 x 10-2mbar

The Endvacuum of the Roughing Pump can be checked by connecting

an external gauge to the Roughing Pump.

For troubleshooting refer to the OEM manual or contact EV Group.

5.12 Cover Open/Close

Check if all covers open and close smoothly.

5.12.1 Open Cover

Check if the status of “Cover” (1) changes from “closed” to “open” when

the cover is opened.

Figure 116 - Status "Cover Open"

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