Operating instructions

Preventive Maintenance Manual

Figure 115

1 Cap nut

2 Baffle

3 Counter nut

5.10 Gauges

The following Gauges are used on the EVG5xx systems (depends on

vacuum system configuration).

• Pfeifer HPT100

• Inficon BCG450

• Thyracont VSK42

• MKS Baratron

• ATM23

For troubleshooting refer to the OEM manual or contact EV Group.

Remove the gauges and ship them to EV Group or to the original

manufacturer for cleaning and recalibration.

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