Operating instructions

Preventive Maintenance Manual

5.8 Vacuum System

Check the functionality of the Vacuum System, depending on the

vacuum system configuration. For the vacuum system specifications

refer to the Acceptance Test Protocol.

1 Vent Valve

2 Purge 1 Valve

3 Chamber Valve

4 Turbo Pump

5 Bypass Valve

6 Turbo Valve

7 Roughing pump

8 Pump (more details refer to

recipe)

9 Pump & Purge (more details

refer to recipe)

10 Purge (more details refer to

recipe)

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