Operating instructions

Preventive Maintenance Manual
90 Copyright © 2012 EVG
5.3 Tool Detection
Visually check the tool detection.
Position of Tool Detection Sensors (1): The sensors must not be bent or
loosen!
Figure 89 - Tool Detection Sensors
Load a bond-chuck into the chamber and check “Tool not loaded” input
in Low IO Chamber x “GW XCO #1-C3.
Figure 90 - Tool Detection input
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