Operating instructions

Preventive Maintenance Manual
84 Copyright © 2012 EVG
4.11 Turbo Pump – Vacuum System
The following Turbo Pumps are used on the EVG5xx systems (depends
on vacuum system configuration).
4.11.1 Pfeifer – THM07x
1) Check the actual speed of the turbot pump in the LOW I/O: “GW
TMH7x”.
Turbo Pump must be in idle mode.
6 & 8inch System: 1500Hz
12inch System: 1000Hz
2) Check the motor current
Turbo pump must be in idle mode. Motor current should be below
1A.
Low I/O “GW TMH7x”
Figure 83 - Low I/O
3) Check the fan on the turbo pump.
A defective fan can result in malfunction of the turbo pump.
4) Replace the lubricant reservoir.
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