Operating instructions

Weekly Maintenance

4.10 Cleaning

For all cleaning processes the entire EVG5xx system must be switched

off, and the heater temperature has to be below 50°C. Alcohol and a

wipe suitable for clean rooms can be used for all cleaning actions.

Clean all bottom heating chucks of bond chamber with alcohol.

Clean the pressure disk of the top heater of pressure lids.

(Example 6”)

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