Operating instructions
Preventive Maintenance Manual
76 Copyright © 2012 EVG
4.8.1 Adjustment of Flags
Perform the following steps for all three flags:
Figure 70 - Flag on Bond Tool
Place a wafer (e.g. a piece of broken wafer) between the bond tool
surface and the flag.
4.8.1.1 Flag Height
There should be a gap (1) between the wafer (2) and the flag (3):
Figure 71 - Flag Height
If necessary the flag height can be adjusted by tightening or loosening
the screw on top and on bottom of the flag:
Figure 72 - Flag Height Adjustment Screws
1
2
3
283 of 370