Operating instructions
Weekly Maintenance
Copyright © 2012 EVG 67
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4.7 Uniformity Check
4.7.1 Pressure Film Test
Needed equipment:
• 2 SI Wafer with blank surface
• Pressure film Ultra Low 13,1' 28-85PSI
• Bondchuck
Figure 57 - Needed Equipment
For the pressure film test two different pressure films are necessary,
one more clear and one white film.
Cut out one peace of each pressure film that has the same size than
the wafer. Now place first a wafer and than the white pressure film (blue
bag) on the bond chuck. The harsh side of the pressure film up. Next
place the more clear pressure film (black bag) with the harsh side down
on the chuck, so that the harsh sides of the pressure films are in
contact.
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