Operating instructions

Preventive Maintenance Manual
66 Copyright © 2012 EVG
3) Open the 3 setscrews on the adjustment ring hold the bottom-part
of the adjustment ring and just rotate the scale. “0” must appear on
front.
4) After that loosen the 2 screws in front (screws which hold the
millimeter ruler) and set the ruler to “0” position.
1 Coarse zero
(edge – zero)
2 Fine zero
5) Check Wafer Bow Pin adjustment:
6) End of instruction
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