Operating instructions
Preventive Maintenance Manual
64 Copyright © 2012 EVG
Wafer bow overlap: 3mm (use a depth gauge to check!)
Figure 56 - Check Wafer Bow overlap
4.6.1.2 Adjust wafer bow pin
1) Rotate adjustment ring for stack height quite to the bottom
2) Activate wafer bow and pull at the paper strip. If it is clamped,
deactivate wafer bow, rotate the adjustment ring a bit up and
activate wafer bow again.
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