Operating instructions

Weekly Maintenance

5) Open Cover and insert Calibration Tool in opening. (Second

person shout hold the Calibration Tool/sheet with soft tension.

Otherwise Calibration tool/sheet could be crumpled)

6) Close bond cover.

7) Adjust calibration sheet to marking 1.

4.6.1.1 Check correct adjustment

• Set the stack height to 500µm.

• Activate wafer bow and pull out the paper strip. It should be possible

to pull it out slightly.

• When setting stack height to 450µm, the paper should be clamped,

at 550µm it should be loosen.

270 of 370