Operating instructions

Preventive Maintenance Manual
60 Copyright © 2012 EVG
4.6 Wafer Bow
4.6.1 Adjust Wafer Bow Pin
Figure 54 - Overview Wafer Bow Scale
1 Locking Hub
2 Adjustment wheel
with scale
3 Scale for find
adjustment
4 Scale for coarse
adjustment
1
2
3
4
267 of 370