Operating instructions
Weekly Maintenance
Copyright © 2012 EVG 55
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load-cell (if equipped):
Figure 50 - Load Cell
Check through the plexi-glass window and make sure the cable can
move free during any piston-motion.
loadcell test:
Prior to doing the loadcell test, make sure the wafer bow is adjusted so
that it doesn’t touch the loadcells after executing the “wafer bow”
command.
There should be no force reading on the loadcells after “wafer bow”.
If there is force, adjust the wafer bow-ring up higher or (on systems
without wafer bow)
Set the top ring higher (loose the 3 screws on the outer perimeter and
shift the ring higher)
The normal gap is 1-2mm (between loadcells and pressure disc) after
“wafer bow” was set.
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