Operating instructions

Weekly Maintenance

Without wafer bow equipped:

Set ring to its very lower position and proceed with measurement.

With piston in upper position, remove center aluminum plate (see this

manual page 9) and apply caliper as shown in the figure below. Set

caliper to 0 before measurement.

Figure 48 - Apply Caliper

Execute piston down (empty bond tool loaded) and check stroke.

Note: This different routine is necessary due to the higher hydraulic fluid

volume of the larger cylinder. The volume in the pressure converter limits the

hydraulic stroke of the cylinder to 10mm.

Therefore, the pneumatic “wafer bow/ hydraulic down” function has to be used

to bring the top-heater down to a maximum separation of 10mm, from there the

hydraulic can go ahead and apply force.

In fact this means that the stack height should never be set higher than stack-

thickness +10mm

Check schematics 2.1.2 for details.

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