Operating instructions

Weekly Maintenance

4.3.2.2 New Hydraulic System

Function description

Other than on the old hydraulic system, the new hydraulic-cylinder is

only a single-acting cylinder anymore. This means, only the “piston

down” function is a hydraulic; the “piston up” function is now executed

by a pneumatic-cylinder on top of the Hydraulic-cylinder.

This makes the medium-separator and other components in the

hydraulic-system obsolete, they can be removed.

Mounting threads and other dimensions are the same on old and new

system so the new-cylinder can be installed without adapters or any

major changes to any EVG equipments.

Further modifications:

• Permanent magnet in the upper piston-rod to avoid any movement

(caused by the chamber-vacuum) while the top-heater is in wafer

bow-position.

• possibility to install a loadcell

• no more retract-spring, the contact-force is not stroke-depending

anymore

• ”leak line” equipped. In case of a leak, hydraulic fluid is led through

this line into the separation bottle located next to the pressure-

converter.

Note:

The sliding gasket cannot provide 100% tightness, a leak rate of up to 15ml per

500 strokes is considered acceptable.

In 24/7 operation, the separation tank should not have to be emptied more than

once in 6months.

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