Operating instructions

Preventive Maintenance Manual

Filling / bleeding the 2nd hydraulic circuit

1) In order to fill the lower hydraulic circuit, the piston must be in its

lowest position.

2) Make sure that there is no bond chuck loaded.

3) Remove the center pin on the bond chuck.

Figure 27

4) Screw the wafer bow scale complete down and turn it up again

1mm.

5) Activate the wafer bow (software) to move the piston down in its

lower position. Make sure the Piston is moving down to its lower

position.

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