Operating instructions

Preventive Maintenance Manual

4.3.1.2 Applying Piston Pressure in Manual Mode

• The pressure cover has to be closed and locked.

Software interlock will prevent the system from applying piston-pressure

with pressure-head open.

• A bond tool has to be in the chamber in order to avoid destruction of

the pressure-disc caused by the bottom-heater chuck-centering pin.

After starting up the EVG Bonder software, please open up the “Manual Setup”

(6” systems) or the “Bonder diagnostic” (8” systems & EVG560).

(Move with cursor over bond module icon and press right trackball

button)

Choose Piston  Set Piston Force

Figure 23 - Enter Piston Force

Parameters

A properly working hydraulic system should achieve following

parameters:

Set force [N] Pneum.

Press

[mbar]

Pneum.

Press [kPa]

Hydr. Press

[bar]

Hydr. Press

[kPa]

10870 1500 150 15.5 1550

26980 3500 350 37.8 3780

39100 5000 500 54.4 5440

Due to machining tolerances, there can be a slight difference between

identical systems (multiple chamber systems). This can be

compensated with offset values; therefore table above may slightly vary

from system to system.

For testing purposes, we recommend to use a metal-disc (wafer size,

Al) instead of a wafer in order to avoid destruction of wafer, bond tool or

pressure-disc.

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