Operating instructions

Daily Maintenance
Copyright © 2012 EVG 23
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3.7.9 Check the clamping force with a Force Gauge
The appropriate clamping force range depends on the wafers that are
clamped. Any deviation from standard wafers (non-Si wafers, special
shape of the wafer edge, thinner wafers, defective edge,..) requires an
investigation of the appropriate clamping force.
Required tools: (shown in Figure19 and 20)
Figure 21 - Top view
1 Clamps
2 Clamp arm
3 Bond chuck
4 Table
5 Flag
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