Operating instructions

Preventive Maintenance Manual

3.7.8 Adjustment of Clamping Force

Figure 18 - Grub screw

The grub screw adjusts the height of the clamping arm and therefore

also the pressure, which is applied to the wafer stack.

Figure 19

These screws are used for the “fine tuning” and for fixing the position of

the clamping arm.

Figure 20 - Clamping arm

After this procedure check the clamping force again. Repeat these

steps until you reach the desired result.

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