Operating instructions

Note to the User
Copyright © 2012 EVG 3
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5 Monthly Maintenance ..............................................................89
5.1 Before starting Monthly Maintenance..............................89
5.2 Cover connection lines....................................................89
5.3 Tool Detection .................................................................90
5.4 Piston Motion ..................................................................91
5.5 Load Cell Test .................................................................91
5.5.1 Load Cell Test Bond Module .................................................91
5.5.2 Load Cell Test UV Bond Module ...........................................95
5.6 Main Pressure Regulator Unit .........................................99
5.7 Check Voltage, Start/Stop, EMO, Mainswitch ...............100
5.7.1 Voltage ................................................................................100
5.7.2 Check Start/Stop .................................................................100
5.7.3 Check EMO Button..............................................................101
5.8 Vacuum System ............................................................102
5.8.1 Maintenance Evacuate ........................................................103
5.8.2 Maintenance Purge .............................................................103
5.8.3 Maintenance Pump and Purge ............................................104
5.9 Safety Valve ..................................................................105
5.10 Gauges .........................................................................106
5.11 Roughing Pump ............................................................107
5.12 Cover Open/Close.........................................................107
5.12.1 Open Cover .........................................................................107
5.12.2 Close Cover.........................................................................108
5.13 Check of Sensors..........................................................108
5.13.1 Leakage Sensor ..................................................................108
5.14 Water filter.....................................................................110
5.15 Water Cooling/Glycol Mix..............................................110
5.15.1 Cooling Water Quality:.........................................................110
5.15.2 Requirements: .....................................................................110
5.16 Water Flow....................................................................110
5.16.1 Adjust Water Flow ...............................................................111
5.16.2 Chiller ..................................................................................111
5.17 Cooling Chucks .............................................................112
5.17.1 Bottom Side Cooling Chuck.................................................112
5.17.2 Top Side Cooling Chuck......................................................116
5.17.3 Cooling Time .......................................................................117
5.18 UV-Light Integrat
or Adjustment..................................... 118
5.18.1 Check Assembling of UV Sensor ........................................118
5.18.2 Mount Sensor to the Light House ........................................120
5.18.3 Voltage Input Adjustment ....................................................121
5.18.4 Monitor Signal Adjustment...................................................122
5.19 Over Temperature Switch
.............................................124
5.19.1 Top Side ..............................................................................124
5.19.2 Bottom side..........................................................................125
6 Quarterly Maintenance..........................................................126
6.1 Checking Bond module and chuck................................126
6.2 Chuck Polish Check ......................................................126
6.2.1 Polish Bond Chuck Insert (Backside) ..................................126
6.2.2 Thermo Chuck .....................................................................127
6.2.3 Maintenance Frequency ......................................................128
6.3 Adjust heater offset .......................................................129
6.3.1 Short Description .................................................................129
6.3.2 How to adjust the temperature offset...................................130
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