Operating instructions

Preventive Maintenance Manual
2 Copyright © 2012 EVG
Table of Contents
1 Note to the User......................................................................... 5
2 Safety .........................................................................................6
3 Daily Maintenance..................................................................... 7
3.1 Control Cabinet................................................................. 7
3.2 Main Pressure................................................................... 8
3.3 Process Gases (Purge Gas) ............................................. 9
3.3.1 Allowed Gases.......................................................................10
3.4 Bond Tools...................................................................... 12
3.4.1 Bond Tool Insert ....................................................................13
3.5 Flags ............................................................................... 15
3.6 Clamping Feet ................................................................ 16
3.7 Clamping Force .............................................................. 17
3.7.1 Required Tools ......................................................................17
3.7.2 Prepare Bondchuck ...............................................................18
3.7.3 Prepare Clamp: Move Flag / Clamp Inside............................19
3.7.4 Mount the Measurement Fitting.............................................19
3.7.5 Install Spring Balance............................................................20
3.7.6 Measurement.........................................................................20
3.7.7 Clamping Force .....................................................................21
3.7.8 Adjustment of Clamping Force ..............................................22
3.7.9 Check the clamping force with a Force Gauge......................23
3.8 Clamping glasses ........................................................... 26
4 Weekly Maintenance ............................................................... 27
4.1 Before starting Weekly Maintenance .............................. 27
4.2 Error Tracking: Memory Leak ......................................... 27
4.3 Hydraulic Systems .......................................................... 27
4.3.1 Hydraulic System...................................................................27
4.3.2 Hydraulic System Upgrade (currently used)..........................37
4.4 High Voltage ................................................................... 56
4.5 Cover Clamps ................................................................. 57
4.5.1 Working principle ...................................................................59
4.6 Wafer Bow ...................................................................... 60
4.6.1 Adjust Wafer Bow Pin............................................................60
4.7 Uniformity Check ............................................................ 67
4.7.1 Pressure Film Test ................................................................67
4.7.2 Check Flatness......................................................................70
4.7.3 Heater Flatness .....................................................................71
4.7.4 Bond Tool Flatness................................................................73
4.7.5 Compliant Layer Graphite 6” .................................................74
4.8 Flag Pulling Mechanism.................................................. 75
4.8.1 Adjustment of Flags...............................................................76
4.9 Pressure Insert ............................................................... 78
4.9.1 Adjustment of Pressure Disc .................................................82
4.10 Cleaning.......................................................................... 83
4.11 Turbo Pump – Vacuum System ...................................... 84
4.11.1 Pfeifer – THM07x...................................................................84
4.12 Cooling Lines – Water System........................................ 86
4.13 Over Temperature Safety Devices.................................. 88
4.13.1 Reset procedure ....................................................................88
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