Operating instructions

Maximum Piston Force

1 Maximum Piston Force

The following table provides benchmark numbers for orientation what is

possible with different pressure disc materials.

Warning: Bondchucks and pressure discs have to match each other. EV Group

recommends using appropriated pressure discs and bondchucks.

Bonding of substrates which do not fit to the specified size of pressure disc

and bondchuck results in lower max piston force, bending or breaking the

pressure disc or substrate.

Note: Bond chucks and pressure discs have to be flat. Warpaged parts can

cause breaking or warping.

The colored field shows the piston force in steady state condition

(without any temperature change).

The white field shows the force applicable during the heating or cooling

sequence. The values are based on standard Si-substrates according

to SEMI standards. If more force is applied either substrate or pressure

disc breakage (Quartz, Ceramic) may occur.

Bonder

Size 150mm

Pressure

Disc for

200mm 150mm 125mm 100mm 3in 2in

Stainl. St.

/Ti

100kN 8kN 60kN 5kN 30kN 4kN 15kN 1,5kN 6kN 1kN

Quartz*

10kN 5kN 8kN 4kN 5kN 2kN 3kN 1kN 2kN 0,5kN

SiN

100kN 20kN 60kN 10kN 25kN 8kN 8kN 6kN 3kN 1kN

*) Quartz material is extremely sensitive to particles on the substrate surface.

Take care that all surfaces which are in contact with the quartz during bonding

are very clean.

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