Operating instructions

Bond Module
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5.4.4 Leak Rate Check
Check the leak rate of the bond chamber.
1) Enter a target pressure for the leak rate check.
2) Enter a timeout value.
3) Click on to confirm.
5.5 High Voltage
5.5.1 Set Voltage
1) Select the polarity (“switch off HV”/”positive polarity”).
2) Click on to confirm.
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