Operating instructions

High Level Menu
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5.4.3 Evacuate – Purge
Evacuate – Purge the bond chamber.
Figure 41
Figure 42
1) Select the purge mode (“Base Purge Line”/“Manual Purge
Line”/”MFC”/”Vacuum Controller”).
2) Select the gas type (Nitrogen/Xenon).
3) Enter a setpoint for the purge function in mbar (if available, Figure
39).
4) Select the evacuate mode (Evacuate Low)
5) Click on to confirm.
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