Operating instructions

Bond Module
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5.4 Vacuum System
5.4.1 Evacuate
Evacuate the bond chamber.
1) Select the mode (“Evacuate off”/“Evacuate low”/”Evacuate high”).
2) Click on to confirm.
5.4.2 Purge
Purge the bond chamber.
1) Select the mode (“Purge Off”/“Vent”/”Base Purge Line”/”Manual
Purge Line”/”MFC”).
2) Click on to confirm.
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