Operating instructions

Recipe Programming

4.3.5 Voltage

The following recipe steps are available if the system is equipped with a

voltage system (needed for anodic bonding processes).

The voltage recipe commands allow:

 Set Voltage: Enables or disables anodic bonding.

 Wait Current: Applies voltage until set current is reached.

 Wait Charge: Makes sure that all the bonded substrates got exactly

the same amount of charge.

4.3.5.1 Set Voltage

With the set voltage command anodic bonding can be enabled or

disabled.

Therefore are used these parameters:

 specified polarity

 voltage setpoint

 current setpoint

Figure 37 - Set Voltage

Value

Description

Polarity

Select a polarity mode. It defines which polarity the part on the

topside of the bonder should have (attached to high voltage

connection).

Voltage Setpoint

Enter the voltage setpoint.

Gradient

Enter the voltage gradient.

Current Setpoint

Enter the current setpoint.

177 of 370