Operating instructions

Recipe Programming

4.3.4 Piston

The piston applies the pressure necessary for the process. The piston

recipe steps allow the following:

 Piston Down: apply specified force to the substrate

 Piston Up: release force and move piston up

 Wait Force: apply force until a certain force is reached

4.3.4.1 Piston Down

With this recipe command the piston moves down and applies the

specified force to the substrate.

The top side heater will be in contact with the substrate.

Figure 35 - Piston Down

Value

Description

Setpoint

Enter the piston force setpoint

Gradient

Enter the force gradient

4.3.4.2 Piston Up

Move piston back up to the start position (separated from the

substrate).

No parameters necessary.

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