Operating instructions

Bond Module

4.3.3 General

4.3.3.1 Flags

With this recipe command the wafer separation flags between the top

and bottom wafer can be pulled out (either all or certain ones).

For pulling the flags individually, the proper check box has to be

activated and the command has to be inserted three times in the recipe

(each time with a different check box activated).

Figure 32 - Flags

Value

Description

Flag 1

Select left flag.

Flag 2

Select middle flag.

Flag 3

Select right flag.

Flags In

Flag move.

4.3.3.2 Wafer Bow On

This recipe step is available if there is a wafer bow function equipped on

the piston of the bond chamber.

Using this recipe step will activate the wafer bow function.

If activated, the ceramic pin will contact the wafers first when the piston

moves down inside the bond chamber.

No parameters necessary.

172 of 370