Operating instructions

Bond Module
38 Copyright © 2013 EVG
4.3.2.4 Wait Pressure
With the wait pressure command, the system waits until the specified
vacuum in the chamber is reached.
Depending on the process command before, the system will check
evacuation (lower than) or purging (higher than).
Figure 31 - Wait Pressure
Value
Description
Mode
Enter a wait mode.
Pressure
Enter a pressure target.
Timeout
Activate timeout
Deadline
Enter a timeout value. It defines the maximum allowed wait time
for the pressure setpoint. It will be reached until the error
recovery action will be activated.
RecoveryAction
Choose the error recovery action
It is recommended to use the Timeout feature only in well-known and
often used processes. The command is not useable for R&D processes
as long as parameters are changed often. The risk that the system
stops the process because of a wrong Timeout is high otherwise.
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