Operating instructions

Recipe Programming
Copyright © 2013 EVG 37
4
4
4.3.2.3 Evacuate-Purge
With this recipe command pressure or flow can be controlled in the
chamber.
It has to be defined in the recipe which parameter is fixed and which
one can float.
There are two possibilities:
 It’s either possible to keep the gas inlet flow constant (MFC)
otherwise it has to be adjusted with the manual needle valve.
 Or keep the gas pressure in the chamber constant by changing the
flow.
Figure 30 - Evacuate-Purge
Value
Description
Evacuate Mode
Select the evacuate mode.
Evacuate Setpoint
Enter a setpoint for the pressure in the chamber.
Purge Type
Select a purge type.
Purge Setpoint
Enter a purge setpoint.
GasType
Select a purge gas type.
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