Operating instructions

Bond Module

4.3.2.2 Purge

With the purge command the chamber will be filled with different types

of gases after evacuation.

Purge Off:

Closes all purge valves and traps the current atmosphere in the

chamber.

Vent:

Fills the chamber with air (from clean room environment). This function

will be activated automatically before the chamber lid opens. It ensures

that the pressure inside and outside the bond chamber is equal.

Base Purge Line:

Flow can be controlled manually (manual valve).

Massflow controlled Purge Line:

Flow is controlled with the mass flow controller.

Figure 29 - Purge

Value

Description

Mode

Select the purge mode.

Purge Type

Select a purge type.

Setpoint

Enter a purge setpoint.

GasType

Select a purge gas type.

168 of 370