Operating instructions

Bond Module
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It depends on the system configuration which symbols you have in the
vacuum system overview:
Symbol
Designation
Valve/Flow control valve
Different Types:
 Bypass valve
 Turbo valve
 Chamber valve
 Vent valve
 Purge valve
 Base Purge Line
 Manual Purge Line
Roughingpump
Turbopump
MFC – Mass Flow Control
Gases
Vacuum Controller
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