Operating instructions

Interlock List

1.3 Over Temperature Sensor

The over temperature sensor checks the temperature of the heaters.

1.3.1 Over Temperature Sensor in the Electronic Rack

(3a)

Sensor:

Temp.limiter TB45 TB/TW-2INP with BC

Function:

If the temperature is higher than 650°C the chamber will be disabled.

Recovery Procedure:

1) Reset the temperature limiter TB45.

2) Enable the chamber.

3) Check the heating and start a new process.

This failure occurs only when there is a problem with the hardware. In

this case call EV Group!

1.3.2 Over Temperature Sensor at the Bond Cover (3b)

Sensor:

Temperature switch R2811EN 65°C nc (marked with “a” in picture

below)

Function:

If the temperature is higher than 63°C the station will be disabled.

Recovery Procedure

Permit a cool down and check the cover cooling (cooling chuck marked

with “b” in picture above). Enable the station and start a new process.

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