Operating instructions

Module Description
Copyright © 2013 EVG 3
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5.5 High Voltage .................................................................... 56
5.5.1 Set Voltage .......................................................................... 56
5.6 Flags ............................................................................... 57
5.6.1 Flags Out ............................................................................. 57
5.7 Recorder ......................................................................... 57
5.7.1 Start Recording .................................................................... 57
5.8 Wafer Bow ....................................................................... 58
5.8.1 Waferbow On ....................................................................... 58
5.8.2 Adjust Waferbow.................................................................. 58
5.9 Resistance ...................................................................... 59
5.9.1 Get Resistance .................................................................... 59
6 Recorder Software ................................................................... 60
6.1 General ........................................................................... 60
6.2 Choose Parameters ........................................................ 61
6.2.1 Settings for Graphs and Scales ........................................... 61
6.3 Measure Bars .................................................................. 64
6.3.1 Show Measure Bar .............................................................. 64
6.3.2 Move Measure Bar .............................................................. 65
6.3.3 Delete Measure Bar ............................................................. 65
6.4 Zoom ............................................................................... 66
6.5 More functions of the recorder Software ......................... 67
6.5.1 Grids .................................................................................... 67
6.5.2 File Info ................................................................................ 67
6.5.3 “Printing” .............................................................................. 68
6.5.4 “About Recorder” ................................................................. 68
6.5.5 Save / Open......................................................................... 68
6.6 Activate the recorder software ......................................... 68
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