Specifications

8200 Compressor Maintenance Procedures
Installation, Operation, and Service Instructions Helium Circuit Decontamination
Brooks Automation 8040353
Revision 108
5-9
Helium Circuit Decontamination
Refer to Section 4 - Maintenance of the appropriate On-Board Cryopump Installation
Operation, and Maintenance manual for information on helium circuit decontamina-
tion.