Specifications

8200 Compressor
Installation, Operation, and Service Instructions
Brooks Automation
Revision 108
Information provided within this document is subject to change without notice, and although believed to be
accurate, Brooks Automation assumes no responsibility for any errors, omissions, or inaccuracies.
AcuLigner, AcuLine, AcuTran, AcuTrav, AeroLoader IV, AeroTrak, ARV 2000, AquaTran, Atmospheric Express,
BALI 400 Indexer, BiSymmetrik, ExpressLock, FabExpress, FixLoad, FrogLeg, Gemini, Gemini Express, Gem-
ini Express Tandem, Guardian Bare Reticle Stocker, Hercules, Hercules Express, InCooler, InLigner, InLine
Express, Leapfrog, Linear eXchange, MagnaTran 7, MagnaTran 70, MagnaTran 8, MagnaTran X, Marathon,
Marathon Express, Marathon Express Tandem, MicroTool, MultiTran, OneFab AMHS, OpenMTS, PASIV, PF-
100, PowerPak, Reliance ATR, Reliance DFR, Reliance WCR, SENTRY, TCM, Time Optimal Trajectory, Top-
Cooler, TurboStocker, TurboStocker XT, Ultrasort, VacuTran, VCD, VCE, VPE, WAVE, WAVE II, Zaris, Z-Bot,
Aquatrap, Conductron, Convectron, Cool Solutions, Cryodyne, Cryogem, Cryogenerator, CryoTiger, Cryo-Torr,
CTI-Cryogenics, FastRegen™, GOLDLink, Granville-Phillips, GUTS, Helix, Micro-Ion, Mini-Convectron,
Mini-Ion
™
, On-Board, Polycold, RetroEase, RetroFast, Stabil-Ion, ThinLine
™
, TrueBlue
SM
, TurboPlus, and Vac-
uum Assurance
SM
are trademarks of Brooks Automation Hardware.
All other trademarks are properties of their respective owners.
© Brooks Automation 2005, All Rights Reserved. The information included in this manual is Brooks Proprietary
Information and is provided for the use of Brooks customers only and cannot be used for distribution, reproduc-
tion, or sale without the expressed written permission of Brooks Automation. This information may be incorpo-
rated into the user’s documentation, however any changes made by the user to this information is the
responsibility of the user.
Brooks Automation
15 Elizabeth Drive
Chelmsford, MA 01824
Phone [phone]
Fax [phone]
For emergencies, contact Technical Support [phone]
www.brooks.com
March 19, 2007 Revision 108 part number 8040353 Per ECO #18029; Alison Dann
This manual is available in the following formats: CD, Paper, Cleanroom.
This manual is available in the following languages: English.
This technology is subject to United States export Administration Regulations and authorized to the destination
only; diversion contrary to U.S. law is prohibited.
Printed in the U.S.A.