User guide

5-4

Installation and Operation Manual

X-TMF-5861i-MFM-eng

Part Number: 541B111AAG

November, 2008

Brooks

Model 5861i

Section 5 Patrs List

5850 Series Service Tool Kit 5850/5860 Series Break Out Board Assembly

P/N S778D017AAA P/N S273Z668AAA for D Connector version

Permits the complete disassembly of the Installs directly between mass flow sensor/

Model 5861i for servicing. controller and interconnecting cable. Allows

convenient access to all signals for easy

Contains: troubleshooting of system.

1 - O-ring Removal Tool

1 - Potentiometer Adjustment Tool 1 - Break Out PC Board

1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable

1 - Phillips Screw Driver 1 - Terminal PC Board

1 - Nut Driver for Orifice

1 - Restrictor Removal Tool

5851i/5861i Header Removal Tool

P/N S817Z036AAA

5861

O-ring Kit

P/N S375Z334***

***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown

Additional publications available:

MFC Contamination Control

Valve Application Guide/Service Manual

Table 5-2 Tool and Spare Part Kits for Model 5861i