User guide

5-1
Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008
Brooks
®
Model 5861i
Section 5 Parts List
5-1 General
When ordering parts, please specify:
Brooks Serial Number
Model Number
Part Description
Part Number
Quantity
(Refer to Figure 5-1 and Tables 5-1 and 5-2).