User guide

4-2
Installation and Operation Manual
X-TMF-5861i-MFM-eng
Part Number: 541B111AAG
November, 2008
Brooks
®
Model 5861i
Section 4 Maintenance
Table 4-2 Sensor Troubleshooting
Trouble Possible Cause Check/Corrective Action
Output stays at 0 Volts Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-2.
regardless of flow.
Output signal stays at a voltage Defective PC Board. Replace PC Board. Refer to Section 4-4.
greater than 5.000 volts and
there is no flow through meter Defective Sensor. Replace Sensor Assembly. Refer to Section 4-4.
Meter grossly out of calibration. Partially clogged sensor. Clean sensor, refer to the cleaning procedure.
Flow is higher than indicated. Refer to Section 4-2.
Meter grossly out of calibration. Partially clogged restrictor. Replace restrictor. Refer to Section 4-4.
Flow is lower than indicated.
Meter output oscillates. Anticipate potentiometer out of adjustment. Adjust anticipate potentiometer. Refer to Section 3-4.
Faulty pressure regulator. Check regulator output.
Defective PC Board. Replace PC Board. Refer to Section 4-4.
Output voltage works properly Loop resistance is too high. Lower loop resistance.
but output current doesn't change
Loop reading device not isolated. Use isolated reading device.
Defective PC board Replace board,Refer to Section 4-4.
Table 4-1 Bench Troubleshooting