
3-4
Installation and Operation Manual
X-TMF-5861i-MFM-eng
Part Number: 541B111AAG
November, 2008
Brooks
®
Model 5861i
Section 3 Operation
Figure 3-2 Model 5861i Calibration Connections
Figure 3-3 Adjustment Potentiometer Location
Figure 3-4 Fast Response Adjustment
*
*Note: Not used for a 5861i