User guide

2-3
Installation and Operation Manual
X-TMF-5861i-MFC-eng
Part Number: 541B111AAG
November, 2008
Brooks
®
Model 5861i
Section 2 Installation
Figure 2-1 Model 5861i Dimensions
Figure 2-2 "D" Type Connector Pin Arrangement
PIN NO. FUNCTION COLOR CODE
1* Set Point Return Black
2 Voltage Signal Output White
3 Not Used
4 Current Signal Output Green
5 +15 to +28Vdc Supply Orange
6 Not Used
7* Current Set Point Input Wht/Blk
8* Voltage Set Point Input Red/Blk
9 Supply Common Grn/Blk
10 Signal Output Return Org/Blk
11* +5 Volt Reference Output Blu/Blk
12* Valve Override Input Blk/Wht
13 Not Used
14 Chassis Ground Grn/Wht
15 Not Used
* These connections are used for the 5850i and 5851i Mass Flow Controllers.
Make no connections to these pins.
NOTE:
1. Cable shield tied to chassis ground in
meter connector. Make no connection
on customer end.
2. All power leads must be connected to
power supply.
Connection "X" Dim.
1/4" Compression
5.17
Fitting 131
1/4" Tube VCO
4.71
120
1/4" Tube VCR
5.03
128
3/8" Compression
5.29
Fitting 134
3/8" or 1/2" Tube
5.15
VCO 131
3/8" or 1/2" Tube
5.33
VCR 135