Owner's manual

Brooks

Model 5860i

Contents

Installation and Operation Manual

X -TMF-5860i-MFM-eng

Part Number:541B110AAG

November, 2008

Figures

Figure Page

Number Number

1-1 Typical Response to Flow Step Changes .......................... 1-2

2-1 Model 5860i Dimensions ................................................... 2-2

2-2 "D" Type Connector Pin Arrangement ............................... 2-2

2-3 Maximum Allowable Loop Resistance ............................... 2-3

2-4 Common Electrical Hook-Ups ........................................... 2-6

3-1 Flow Sensor Operational Diagram .................................... 3-2

3-2 Model 5860i Calibration Connections ................................ 3-4

3-3 Adjustment Potentiometer Location................................... 3-4

3-4 Fast Response Adjustment ............................................... 3-4

3-5 PC Board Jumper Location and Function .......................... 3-6

5-1 Model 5860i Parts Drawing ............................................... 5-2

Tables

Table Page

2-1 Recommended Filter Size ................................................. 2-5

4-1 Bench Troubleshooting ...................................................... 4-2

4-2 Sensor Troubleshooting ..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base) ................................. 4-7

4-4 Restrictor Selection Guide................................................ 4-11

5-1 Model 5860i Replacement Parts List ................................. 5-3

5-2 Tool and Spare Part Kits for 5860i .......................................... 5-3