Owner's manual

Brooks

Model 5860i

Contents

Installation and Operation Manual

X -TMF-5860i-MFM-eng

Part Number: 541B110AAG

November, 2008

Section 1

Introduction

Paragraph Page

Number Number

1-1 Purpose ............................................................................. 1-1

1-2 Description ........................................................................ 1-1

1-3 Specifications .................................................................... 1-2

Section 2

Installation

2-1 Receipt of Equipment ........................................................ 2-1

2-2 Recommended Storage Practice....................................... 2-1

2-3 Return Shipment ............................................................... 2-3

2-4 Gas Connections ............................................................... 2-4

2-5 Installation ......................................................................... 2-4

2-6 In-Line Filter ...................................................................... 2-5

2-7 Electrical Interfacing .......................................................... 2-5

2-8 Configuring PC Board ....................................................... 2-6

Section 3

Operation

3-1 Theory of Operation .......................................................... 3-1

3-2 Operating Procedure ......................................................... 3-2

3-3 Zero Adjustment ................................................................ 3-2

3-4 Calibration Procedure ........................................................ 3-3

3-5 Response (Flow Output Signal) ........................................ 3-7

Section 4

Maintenance

4-1 General.............................................................................. 4-1

4-2 Troubleshooting ................................................................. 4-1

4-3 Sensor Tube ...................................................................... 4-4

4-4 Disassembly and Assembly .............................................. 4-4

4-5 Use of the Conversion Tables ............................................ 4-6

4-6 Restrictor Sizing ................................................................ 4-9

Section 5

Parts List

5-1 General.............................................................................. 5-1

Section A

CE Certification

CE Certification of Mass Flow Equipment ......................... A-1