Owner's manual

4-11
Brooks
®
Model 5860i
Section 4 Maintenance
Installation and Operation Manual
X-TMF-5860i-MFM-eng
Part Number: 541B110AAG
November, 2008
Table 4-4 Model 5860i Standard Restrictors
Range Part Number
sccm Air Equivalent Flow
Size Low High ACLFE Wire Mesh
D 8.038 11.38 S110Z275*
E 11.25 15.93 S110Z276
F 15.75 22.30 S110Z277
G 22.05 31.23 S110Z278
H 30.88 43.73 S110Z279
J 43.23 61.21 S110Z280
K 60.52 85.70 S110Z281
L 84.73 119.9 S110Z282
M 118.6 167.9 S110Z283
N 166.0 235.2 S110Z284
P 232.5 329.3 S110Z285
Q 325.4 460.9 S110Z286
R 455.7 645.3 S110Z287
S 638.0 903.4 S110Z288
T 893.2 1265. S110Z289
U 1250. 1771. S110Z290
V 1750. 2479. S110Z291
W 2451. 3471. S110Z292
X 3431. 4859. S110Z319*
Y 4804. 6802. S110Z321
1 6724. 9523. S110Z317
2 9388. 13337. S110Z228
3 13176. 18667. S110Z226
4 18457. 30060. S110Z224
*Materials: BMT = 316 Stainless Steel (ACLFE only)
CVA = Hastelloy
®
C (ACLFE and Sintered)
DCA = Monel
®
R (ACLFE and Sintered)
BMA = Sintered 316 Stainless Steel (Wire Mesh and Sintered)
NOTE:For flow rates less than 8 sccm use the low flow plug, P/N 618-K-020-BMT in place of a
restrictor assembly.