Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Model 5860i Mass Flow Meter Brooks® Model 5860i
Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Essential Instructions Read this page before proceeding! Brooks Instrument designs, manufactures and tests its products to meet many national and international standards. Because these instruments are sophisticated technical products, you must properly install, use and maintain them to ensure they continue to operate within their normal specifications.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Dear Customer, We appreciate this opportunity to service your flow measurement and control requirements with a Brooks Instrument device. Every day, flow customers all over the world turn to Brooks Instrument for solutions to their gas and liquid low-flow applications.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Contents Installation and Operation Manual X -TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Section 1 Introduction Paragraph Number Page Number 1-1 1-2 1-3 Purpose ............................................................................. 1-1 Description ........................................................................ 1-1 Specifications ....................................................................
Contents Installation and Operation Manual X -TMF-5860i-MFM-eng Part Number:541B110AAG November, 2008 Brooks® Model 5860i Figures Figure Number Page Number 1-1 Typical Response to Flow Step Changes .......................... 1-2 2-1 2-2 2-3 2-4 Model 5860i Dimensions ................................................... "D" Type Connector Pin Arrangement ............................... Maximum Allowable Loop Resistance ............................... Common Electrical Hook-Ups .........................
Section 1 Introduction Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 1-1 Purpose The Brooks® Model 5860i Flow Meter is a mass flow measurement device designed for accurately measuring flows of gases. This instruction manual is intended to provide the user with all the information necessary to install, operate and maintain the Brooks 5860i Mass Flow Meter.
Section 1 Introduction Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Figure 1-1 Typical Response to Flow Step Changes Standard Ranges Any full scale flowrate from 3 sccm to 30 slpm* (Nitrogen equivalent) *Standard temperature and pressure in accordance with SEMI (Semiconductor Equipment and Materials International) standard: 0° C and 101.3 kPa (760 Torr). Accuracy ±1% full scale including linearity at calibration conditions. ±1.
Section 1 Introduction Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Ambient Temperature Limits Operating: 5 to 65°C (40 to 150°F) Non-Operating: -25 to 100°C (-13 to +212°F) Working Pressure 4500 psi (31.03 MPa) maximum Output Signal 0-5 Vdc into 2000 ohms or greater. Maximum ripple 3 mV. Jumper selectable 4-20 mAdc or 0-20 mAdc. Refer to Figure 2-3 for maximum total loop resistance. Temperature Sensitivity Zero: Less than ±0.075% F.S.
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Section 2 Installation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 2-1 Receipt of Equipment When the equipment is received, the outside packing case should be checked for damage incurred during shipment. If the packing case is damaged, the local carrier should be notified at once regarding his liability. A report should be submitted to the Product Service Department, Brooks Instrument, Hatfield, Pennsylvania 19440-0903.
Section 2 Installation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Figure 2-3 Maximum Allowable Loop Resistance 2-3 Return Shipment Prior to returning any Brooks equipment to the factory, contact the factory for a Return Materials Authorization Number (RMA#). This can be obtained at Brooks Instrument, Product Service Department, 407 West Vine Street, Hatfield, PA 19440-0903, or call toll free 1-888-554-FLOW (3569).
Section 2 Installation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 2-4 Gas Connections Standard inlet and outlet connections supplied on the Model 5860i are 1/ 4" compression fittings for flow rates up to 10 slpm, and 3/8" compression fittings for higher flow rates. Optional 1/8 compression, VCOTM and VCRTM connections are available upon request. Prior to installation, make certain all piping is clean and free of obstructions.
Section 2 Installation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i INCHES/MILLIMETERS Connection "X"Dim. 1/4"Compression Fitting 4.32 109.7 1/4" Tube VCO 3.86 98.0 1/4" Tube VCR 4.18 106.2 3/8"Compression Fitting 4.44 112.8 Figure 2-1 Model 5860i Dimensions PIN NO.
Section 2 Installation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 2-6 In-Line Filter It is recommended that an in-line filter be installed upstream from the flowmeter to prevent the possibility of any foreign material entering the flow sensor. The filtering element should be replaced periodically or ultrasonically cleaned.
Section 2 Installation Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 2-8 Configuring the PC Board NOTE: To obtain access to the jumpers, the electronics cover must be removed. Disconnect the power to the mass flow meter, and cables to the D-connector. Remove the three screws at the base of the can and remove the top jack post of the D-connector. Remove the can. The can must be replaced before returning the unit to service.
Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 3-1 Theory of Operation The thermal mass flow sensing technique used in the 5860i works as follows: A precision power supply provides a constant power heat input (P) at the heater which is located at the midpoint of the sensor tube.
Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Figure 3-1 Flow Sensor Operational Diagram 3-2 Operating Procedure a. Apply power to the flowmeter and allow approximately 45 minutes for the instrument to warm-up and stabilize its temperature. b. Turn on the gas supply. c. Shut-off flow to the meter and observe the flowmeter's output signal.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 3 Operation Brooks® Model 5860i potentiometer (refer to Figure 3-3) until the desired output signal is obtained. 3-4 Calibration Procedure NOTE 1: Calibration of the Model 5860i mass flowmeter requires the use of a digital voltmeter (DVM) a flow control valve or mass flow controller to set the flow rate and a precision flow standard calibrator such as the Brooks Vol-U-Meter®.
Section 3 Operation Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Figure 3-2 Model 5860i Calibration Connections Figure 3-3 Adjustment Potentiometer Location 3-4 Figure 3-4 Fast Response Adjustment
Section 3 Operation Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Example: What is the percent of full scale error when full scale is equal to 100 sccm? Measured flow rate = 50.0 sccm Indicated flow rate = 48.5 sccm h. Calculate the TP2 correction voltage: (error recorded in step g) x 0.450 volts Example: Error = -1.5% TP2 correction voltage = -1.5 x 0.450 = -0.675 volts New TP2 voltage = 0 volts + (-0.675) = -0.675 volts i.
Section 3 Operation Brooks® Model 5860i 3-6 Figure 3-5 PC Board Jumper Location and Function Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 3 Operation Brooks® Model 5860i 3-5 Response (Flow Output Signal) To achieve the proper response characteristics the response compensation circuit must be adjusted. This adjustment is performed by observing the output signal of the meter when the flow is suddenly stopped. Place a metering valve upstream of the Model 5860i to control the flow rate.
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Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 4 Maintenance Brooks® Model 5860i 4-1 General No routine maintenance is required on the Model 5860i other than an occasional cleaning. If an in-line filter is used, the filtering element should periodically be replaced or ultrasonically cleaned. 4-2 Troubleshooting A. System Checks The Model 5860i is generally used as a component in gas handling systems which can be quite complex.
Section 4 Maintenance Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Table 4-1 Bench Troubleshooting Trouble Possible Cause Check/Corrective Action Output stays at 0 Volts regardless of flow. Clogged Sensor. Clean sensor. Refer to cleaning procedure. Section 4-2. Output signal stays at +6.8V and there is no flow through the meter. Defective PC Board. Replace PC Board. Refer to Section 4-4. Defective Sensor.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 4 Maintenance Brooks® Model 5860i voltmeter recommended) pins 2 and 10 (Refer to Figure 2-2). Apply power, and allow the flowmeter to warm up for 45 minutes. Do not connect to a gas source at this time. Observe the output signal and, if necessary perform the zero adjustment procedure (Section 3-3).
Section 4 Maintenance Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 An alternate method for flushing out the sensor is to replace the restrictor element with a low flow plug restrictor. This plug forces all the flow through the sensor and may dislodge any obstructions. Subject the flow meter to a high differential pressure.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 4 Maintenance Brooks® Model 5860i 1. Remove the three screws (8) attaching the electronics cover and loosen the upper jack post on the D-Connector. Remove the electronics cover (11). 2. Unplug the sensor connector from the PC Board. Remove the two screws securing the bracket (13) and PC Board (2). Remove the bracket and PC Board. 3.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 4. Install the sensor assembly (3) as shown in Figure 5-1 and secure with the two socket head cap screws (6) and washers (7). Tighten the screws to 28 in-lbs. 5. Install the printed circuit board (2), secure with bracket (13) and two screws (8). Plug the connector from the sensor assembly (3) onto the PC Board.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Table 4-3 Conversion Factors (Nitrogen Base) GAS NAME FORMULA Acetylene Air Allene Ammonia Argon Arsine Boron Trichloride Boron Trifluoride Bromine Pentafluoride Bromine Trifluoride Bromotrifluoroethylene Bromotrifluoromethane f-13B1 1,3-Butadiene Butane 1-Butene CIS-2-Butene Trans-2-Butene Carbon Dioxide Carbon Disulfide Carbon Monoxide Carbon Tetrachloride Carbon Tetr
Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Table 4-3 Conversion Factors (Nitrogen Base) Continued 4-8 GAS NAME FORMULA Hydrogen Hydrogen Bromide Hydrogen Chloride Hydrogen Cyanide Hydrogen Fluoride Hydrogen Iodide Hydrogen Selenide Hydrogen Sulfide Iodine Pentafluoride Isobutane Isobutene Isopentane Krypton Methane Methylacetylene Methyl Bromide 3-Methyl-1-butene Methyl Chloride Methyl Fluoride Methyl Mercaptan
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section 4 Maintenance Brooks® Model 5860i It is generally accepted that the mass flow rate derived from this equation is only accurate to ±5%. The sensor conversion factors given in Table 4-3 are calculated based on a gas temperature of 21°C and a pressure of one atmosphere.
Section 4 Maintenance Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Example: The desired gas is Silane (SiH4). The desired full scale flow rate is 200 sccm. Sensor conversion factor is 0.679 from Table 4-3. Air equivalent flow = 200/0.679 = 294.5 sccm Nitrogen. In the example above a size P restrictor would be selected.
Section 4 Maintenance Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Table 4-4 Model 5860i Standard Restrictors Size D E F G H J K L M N P Q R S T U V W X Y 1 2 3 4 Range sccm Air Equivalent Flow Low High 8.038 11.38 11.25 15.93 15.75 22.30 22.05 31.23 30.88 43.73 43.23 61.21 60.52 85.70 84.73 119.9 118.6 167.9 166.0 235.2 232.5 329.3 325.4 460.9 455.7 645.3 638.0 903.4 893.2 1265. 1250. 1771. 1750. 2479. 2451. 3471. 3431. 4859. 4804.
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Section 5 Parts List Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i 5-1 General When ordering parts, please specify: Brooks Serial Number Model Number Part Description Part Number Quantity (Refer to Figure 5-1 and Tables 5-1 and 5-2).
Section 5 Parts List Brooks® Model 5860i 5-2 Figure 5-1 Model 5860i Parts Drawing Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008
Section 5 Parts List Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i Table 5-1 Model 5860i Replacement Parts List Item No. 1 2 3 4 5 6 7 8 9 Qty.
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Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section A CE Certifiction Brooks® Model 5860i Dansk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Emne : Tillæg til instruktions manual. Reference : CE mærkning af Masse Flow udstyr Dato : Januar-1996. Brooks Instrument har gennemført CE mærkning af elektronisk udstyr med succes, i henhold til regulativet om elektrisk støj (EMC direktivet 89/336/EEC).
Section A CE Certifiction Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 English Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Subject : Addendum to the Instruction Manual. Reference : CE certification of Mass Flow Equipment Date : January-1996. The Brooks (electric/electronic) equipment bearing the CE mark has been successfully tested to the regulations of the Electro Magnetic Compatibility (EMC directive 89/336/EEC).
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section A CE Certifiction Brooks® Model 5860i Français Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Sujet : Annexe au Manuel d’Instructions. Référence : Certification CE des Débitmètres Massiques à Effet Thermique. Date : Janvier 1996.
Section A CE Certifiction Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Italiano Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Oggetto : Addendum al manuale di istruzioni. Riferimento : Certificazione CE dei misuratori termici di portata in massa Data : Gennaio 1996.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Section A CE Certifiction Brooks® Model 5860i Norsk Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A.
Section A CE Certifiction Brooks® Model 5860i Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Suomi Brooks Instrument 407 West Vine St. Hatfield, PA 19440 U.S.A. Asia : Lisäys Käyttöohjeisiin Viite : Massamäärämittareiden CE sertifiointi Päivämäärä : Tammikuu 1996 Brooksin CE merkillä varustetut sähköiset laitteet ovat läpäissyt EMC testit (direktiivi 89/336/EEC). Erityistä huomiota on kuitenkin kiinnitettävä signaalikaapelin valintaan.
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i THIS PAGE WAS INTENTIONALLY LEFT BLANK
Installation and Operation Manual X-TMF-5860i-MFM-eng Part Number: 541B110AAG November, 2008 Brooks® Model 5860i LIMITED WARRANTY Seller warrants that the Goods manufactured by Seller will be free from defects in materials or workmanship under normal use and service and that the Software will execute the programming instructions provided by Seller until the expiration of the earlier of twelve (12) months from the date of initial installation or eighteen (18) months from the date of shipment by Seller.
