Manual

Installation and Operation Manual

X-TMF-5860E-MFM-eng

Part Number: 541B106AAG

November, 2008

Brooks

Model 5860E

Contents

Figures

Figure Page

Number Number

1-1 Typical Response to Flow Step Changes........................... 1-2

2-1 Model 5860E Dimensions .................................................. 2-3

2-2 "D" Type Connector Pin Arrangement ................................ 2-3

3-1 Flow Sensor Operational Diagram ..................................... 3-2

3-2 Model 5860E Calibration Connections ............................... 3-4

3-3 Adjustment Potentiometer Location ................................... 3-4

3-4 Fast Response Adjustment................................................ 3-4

5-1 Model 5860E Parts Drawing .............................................. 5-2

Tables

Table Page

Number Number

2-1 Recommended Filter Size ................................................. 2-4

4-1 Bench Troubleshooting ...................................................... 4-2

4-2 Sensor Troubleshooting ..................................................... 4-2

4-3 Conversion Factors (Nitrogen Base).................................. 4-7

4-4 Model 5860E Standard Restrictors ....................................4-11

5-1 Model 5860E Replacement Parts List................................ 5-3

5-2 Tool and Spare Part Kits for 5860E .................................... 5-3