Manual

5-3
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 5 Parts List
Item
No. Qty. Description Part Number
1 1 Flowmeter Body 092Z773BM%
2 1 PC Board Assembly (D-Connector) S097Y847AAA
3 1 Sensor Assembly S774Z607AAA
4 2 O-ring, Sensor, Size 004 375B004***
5 2 Backup Ring, Sensor 962A027NZA
6 2 Screw Sensor Body 751Z107AA0
7 2 Lock Washer, Sensor 926D006AWA
8 5 Screw, Sensor PC Board Cover 753L056AWZ
9 1 Restrictor Assembly and Components
(Refer to Section 4-7 for sizing)
10 1 O-ring, Restrictor, Size 109 375B109***
11 1 Electronics Cover Can (D-Connector) 219Z392EA%
12 1 Cover Plate 852Z213EA%
13 1 PC Board Mounting Bracket 079Z135EAA
14 2 Pot Hole Plug 620Z434SXA
Fittings:
1/4" Compression, Swagelok 320B136BMA
NS 2 1/4" Male VCR, Cajon 315Z036BMA
1/4" Male VCO, Cajon 315Z035BMA
15 2 O-ring, Fitting, Size 906 375B906***
NS 2 O-ring, VCO Gland, Size 010 375B010***
Interconnecting Cables: Length: D-type
Connector on one end 5 Feet S124Z361AAA
with no termination 10 Feet S124Z362AAA
NS on other end 25 Feet S124Z363AAA
1 50 Feet S124Z435AAA
Connector on one end 5 Feet S124Z576AAA
NS with Connector for Model 5870 10 Feet S124Z577AAA
Series Secondary 25 Feet S124Z578AAA
Electronics on other end 50 Feet S124Z579AAA
NS 2 8-32 Mounting Screw Customer Supplied
***QTA=Viton, SUA=Buna, TTA=Kalrez, AR=As Required, NS=Not Shown
Table 5-1 Model 5860E Replacement Parts List
Model 5850 Service Tool Kit Model 5850 Break Out Board Assembly
P/N S778D017AAA P/N S273Z668AAA
Permits the complete disassembly of the Installs directly between mass flow sensor/
Model 5850E for servicing. controller and interconnecting cable. Allows
convenient access to all signals for easy
Contains: troubleshooting of system.
1 - O-ring Removal Tool
1 - Potentiometer Adjustment Tool 1 - Break Out PC Board
1 - Ball Point Allen Wrench 1 - 5 foot Extension Cable
1 - Phillips Screw Driver 1 - Terminal PC Board
1 - Nut Driver for Orifice
1 - Restrictor Removal Tool
1 - Common Screw Driver
Table 5-2 Tool and Spare Part Kits for Model 5860E