Manual

4-11
Installation and Operation Manual
X-TMF-5860E-MFM-eng
Part Number: 541B106AAG
November, 2008
Brooks
®
Model 5860E
Section 4 Maintenance
Table 4-4 Model 5860E Standard Restrictors
Range Part Number*
sccm Air Equivalent Flow
Size Low High Sintered ACLFE Wire Mesh
D 8.022 11.36 S110Z296 S110Z275
E 11.23 15.90 S110Z297 S110Z276
F 15.72 22.26 S110Z298 S110Z277
G 22.01 31.17 S110Z299 S110Z278
H 30.82 43.64 S110Z300 S110Z279
J 43.14 61.09 S110Z301 S110Z-280
K 60.40 85.53 S110Z302 S110Z281
L 84.56 119.7 S110Z303 S110Z282
M 118.4 167.6 S110Z304 S110Z283
N 165.7 234.7 S110Z305 S110Z284
P 232.0 328.6 S110Z306 S110Z285
Q 324.8 460.0 S110Z307 S110Z286
R 454.8 644.0 S110Z308 S110Z287
S 636.7 901.6 S110Z309 S110Z288
T 891.4 1262. S110Z310 S110Z289
U 1248. 1767. S110Z311 S110Z290
V 1747. 2474. S110Z312 S110Z291
W 2446. 3464. S110Z313 S110Z292
X 3424. 4849. S110Z319
Y 4794. 6789. S110Z321
1 6711. 9504. S110Z317
2 9396. 13310. S110Z228
3 13150. 18630. S110Z226
4 18420. 30000. S110Z224
*Materials: BMT = 316 Stainless Steel (ACLFE only)
BMA = Sintered 316 Stainless Steel (Wire Mesh and Sintered)
NOTE: For flow rates less than 8 sccm use the low flow plug, P/N 618K020BMT in place of a
restrictor assembly.